PLANSEE sputtering targets made of molybdenum, tungsten, tantalum, chromium and their alloys are used for the production of electrode, adhesion or diffusion barrier layers for coatings used in TFT-LCD and touch screen panels. They are found in TV screens, monitors, cell phones, PND systems and other mobile devises. PLANSEE has the longest in-house supply chain for the production of sputtering targets.

All processes - from the raw material to the final product - are designed to assure constant disposibility and to reach the highest quality of our products. The result of our extensive powder metallurgical expertise: Our sputtering targets exhibit a high degree of purity, a homogeneous microstructure, and full density. 

The advantages of PLANSEE sputtering targets for flat panel displays:

• Full density due to special deformation processes

• High purity

• Excellent homogeneity

• Excellent corrosion resistance

• All targets built to OEM specifications

• Inhouse bonding services

• Local service all over the world

Thin film materials:

• Molybdenum and highly corrosion resistant molybdenum alloys (eg. MoTa)
• Tungsten
• Tantalum
• Chromium and chromium alloys
• Aluminum
• Copper

Geometries and dimensions

• Rotary targets up to 4 m length

• Planar targets up to Gen 10 or even higher

• Customer-specific geometries

• Inhouse bonding services

PLANSEE inhouse development. Setting new standards in tomorrow’s display technology.
Far-sighted investments in research and development form the backbone of our innovative power. PLANSEE is your partner in optimizing the layer structure for a perfect TFT performance. In cooperation with our customers and sputtering equipment manufacturers, we also develop customized materials and products. We utilize our own state-of-the-art coating and analysis laboratories to create new solutions at every stage of the target development process – from the feasibility check, prototyping and production, film deposition trials and layer performance tests, through to serial target production.

MoTa: Even stronger against corrosion.
MoTa thin films possess highest resistance against corrosion as well as oxidation.
This makes the material perfectly suited for Touch Panel applications. Due to its unique composition and properties MoTa performs best under challenging conditions.

For further information about PLANSEE sputtering targets please contact our coating team coating@plansee.com. We are looking forward to your request!